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Analysis of silicon oxynitride layers by the complementary use of elastic backscattering and nuclear reactions

✍ Scribed by Barcz, A. ;Turos, A. ;Wieluński, L. ;Skrzynecka, I.

Book ID: 105370626
Publisher: John Wiley and Sons
Year: 1975
Tongue: English
Weight: 479 KB
Volume: 28
Category: Article
ISSN: 0031-8965
DOI: 10.1002/pssa.2210280134

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