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Investigation of ion-beam sputtered Nb-Ti thin films by complementary use of backscattering and nuclear reaction microanalysis


Book ID
108390178
Publisher
Elsevier Science
Year
1980
Tongue
English
Weight
157 KB
Volume
30
Category
Article
ISSN
0042-207X

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2483. Investigation of reactively sputte
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Classified abstracts 2475-2483 at 600ยฐC in 11.2 ~ Ag/Cu bimetallic thin films prepared by vapour deposition on mica. The technique consists in matching experimental intensity bands to those calculated from assumed concentration profiles. The profiles which gave best fit in the Ag-rich layer were ana