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Analysis of phosphosilicate glass layers by backscattering and channeling effect measurements

✍ Scribed by Linker, G. ;Meyer, O. ;Scherber, W.

Publisher: John Wiley and Sons
Year: 1973
Tongue: English
Weight: 499 KB
Volume: 16
Category: Article
ISSN: 0031-8965
DOI: 10.1002/pssa.2210160205

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