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Analysis of a Capacitively Coupled Dual-Frequency CF 4 Discharge

✍ Scribed by Donkó, Z.; Petrović, Z. Lj.

Book ID: 121481114
Publisher: Institute of Pure and Applied Physics
Year: 2006
Tongue: English
Weight: 999 KB
Volume: 45
Category: Article
ISSN: 0021-4922
DOI: 10.1143/JJAP.45.8151

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