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An XPS study of hafnium nitride films

✍ Scribed by A.J. Perry; L. Schlapbach

Publisher: Elsevier Science
Year: 1985
Tongue: English
Weight: 333 KB
Volume: 56
Category: Article
ISSN: 0038-1098
DOI: 10.1016/0038-1098(85)90416-8

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