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Positron lifetime study of hafnium nitride films

✍ Scribed by Dr. J. Brunner; Dr. A. J. Perry

Publisher
John Wiley and Sons
Year
1988
Tongue
English
Weight
220 KB
Volume
23
Category
Article
ISSN
0232-1300

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✦ Synopsis

Films of HfN can have expanded lattices which are restored by tempering, reflecting the presence of a high concentration of defects. The present study was made to get a qualitative understanding of the lattice relaxation on an atomic scale. The results support the proposal that the dominant mechanism is the migration of interstitial stoms into lattice vacancies. Die Ausdehnung des Gitters bei durch reaktives Zerstauben (PVD) hergestellten HfN-Schichten weist auf eine hohe Defektkonzentration hin. I m Positronen-Lebensdauerspektrurn tritt eine Komponente auf, die dem Einfang von Positronen in Leerstellen entspricht. Die Abnahme ihrer Intensitiit und des Gitterparameters nach dem Anlassen erkliirt sich durch die Wanderung von Zwischengitteratomen in die Leerstellen.

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