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An investigation of the structural properties of diamond films deposited by pulsed bias enhanced hot filament CVD

✍ Scribed by I.U. Hassan; C.A. Rego; N. Ali; W. Ahmed; I.P. O'Hare


Book ID
114086828
Publisher
Elsevier Science
Year
1999
Tongue
English
Weight
593 KB
Volume
355-356
Category
Article
ISSN
0040-6090

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## Abstract Porous diamond (PD) films have been grown on sintered WC‐13 wt.%Co substrates by bias enhanced hot filament (HF) chemical vapour deposition (CVD) methods and characterized by scanning electron microscopy (SEM), laser Raman spectroscopy and X‐ray diffraction (XRD). The PD films show exce