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An in-plane, bi-directional electrothermal MEMS actuator

โœ Scribed by Venditti, Roberto; Lee, Jacky S H; Sun, Yu; Li, Dongqing


Book ID
120439940
Publisher
Institute of Physics
Year
2006
Tongue
English
Weight
400 KB
Volume
16
Category
Article
ISSN
0960-1317

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