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[IEEE 2013 International Conference on Optical MEMS and Nanophotonics (OMN) - Kanazawa, Japan (2013.08.18-2013.08.22)] 2013 International Conference on Optical MEMS and Nanophotonics (OMN) - An electrothermal/electrostatic dual driven MEMS scanner with large in-plane and out-of-plane displacement

✍ Scribed by Zhang, Xiaoyang; Liu, Lin; Liang, Wenxuan; Li, Xingde; Xie, Huikai

Book ID: 124054246
Publisher: IEEE
Year: 2013
Weight: 695 KB
Category: Article
ISBN: 1479911542
DOI: 10.1109/OMN.2013.6659035

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