[IEEE 2013 International Conference on Optical MEMS and Nanophotonics (OMN) - Kanazawa, Japan (2013.08.18-2013.08.22)] 2013 International Conference on Optical MEMS and Nanophotonics (OMN) - A physical modeling and long-term measurement of tilting angle drift caused by dielectric surface charging in MEMS micromirrors

✍ Scribed by Nakajima, Mitsumasa; Kuwabara, Kei; Ishihara, Takako; Sakata, Tomomi; Usui, Mitsuo; Nemoto, Naru; Hashimoto, Etsu; Yamaguchi, Joji; Uchiyama, Shingo; Jin, Yoshito

• Book ID: 126608925
• Publisher: IEEE
• Year: 2013
• Weight: 355 KB
• Category: Article
• ISBN: 1479911542
• DOI: 10.1109/OMN.2013.6659038