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On-chip actuation of an in-plane compliant bistable micromechanism

✍ Scribed by M. Baker; L. Howell

Book ID: 126740217
Publisher: IEEE
Year: 2002
Tongue: English
Weight: 295 KB
Volume: 11
Category: Article
ISSN: 1057-7157
DOI: 10.1109/JMEMS.2002.803284

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