✦ LIBER ✦

Amorphous W40Re40B20 diffusion barriers for /Al and /Cu metallizations

✍ Scribed by E. Kolawa; X. Sun; J.S. Reid; J.S. Chen; M.-A. Nicolet; R. Ruiz

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Diffusion of Cu and Ti in Amorphous Fe40

✍ Sharma, S. K. ;Macht, M.-P. ;Naundorf, V. 📂 Article 📅 1991 🏛 John Wiley and Sons 🌐 English ⚖ 514 KB

Amorphous Ta-Si-N diffusion barriers in

✍ E. Kolawa; P.J. Pokela; J.S. Reid; J.S. Chen; M.-A. Nicolet 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 364 KB

Some correlations observed for diffusion

✍ S.K. Sharma; M.-P. Macht; V. Naundorf 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 294 KB

W-B-N diffusion barriers for Si/Cu metal

✍ J.S. Reid; R.Y. Liu; Paul Martin Smith; R.P. Ruiz; M.-A. Nicolet 📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 636 KB

Evaluation of amorphous (Mo, Ta, W)SiN

✍ J.S. Reid; E. Kolawa; R.P. Ruiz; M.-A. Nicolet 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 520 KB

Evaluation of LPCVD MeSiN (MeTa, Ti,

✍ E. Blanquet; A.M. Dutron; V. Ghetta; C. Bernard; R. Madar 📂 Article 📅 1997 🏛 Elsevier Science 🌐 English ⚖ 430 KB