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Amorphous carbon and carbon nitride films synthesized by electrolysis of nitrogen-containing liquid

โœ Scribed by Wang, Hao; Kiyota, Hideo; Miyo, Toshiya; Kitaguchi, Keita; Shiga, Tomohito; Kurosu, Tateki; Zhu, He-Sun; Iida, Masamori

Book ID
121481277
Publisher
Elsevier Science
Year
2000
Tongue
English
Weight
160 KB
Volume
9
Category
Article
ISSN
0925-9635

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Carbon nitride thin films deposited on Si(1 0 0) have been synthesized by electron beam evaporation of graphite in nitrogen atmosphere for various N pressures and at different substrate temperatures. The layers were analyzed by X-ray photoelectron spectra, Fourier transforms infrared spectroscopy an