✦ LIBER ✦

Amorphous BN films produced in a double-plasma reactor for semiconductor applications

✍ Scribed by W. Schmolla; H.L. Hartnagel

Book ID: 107856643
Publisher: Elsevier Science
Year: 1983
Tongue: English
Weight: 504 KB
Volume: 26
Category: Article
ISSN: 0038-1101
DOI: 10.1016/0038-1101(83)90069-2

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Amorphous BN films produced in a double-

Amorphous BN films produced in a double-plasma reactor for semiconductor applications: W. Schmolla and H.L. Hartnagel Solid St. Electron. 26 (10), 931 (1983)

📂 Article 📅 1986 🏛 Elsevier Science 🌐 English ⚖ 67 KB

Amorphous BN films produced in a double-

Amorphous BN films produced in a double-plasma reactor for semiconductor applications : W. Schmolla and H. L. Hartnagel. Solid-St. Electron.26 (10), 931 (1983)

📂 Article 📅 1984 🏛 Elsevier Science 🌐 English ⚖ 126 KB

Characterization of a-SiC:H films produc

Characterization of a-SiC:H films produced in a standard plasma enhanced chemical vapor deposition system for x-ray mask application

✍ A. Jean; M. Chaker; Y. Diawara; P. K. Leung; E. Gat; P. P. Mercier; H. Pépin; S 📂 Article 📅 1992 🏛 American Institute of Physics 🌐 English ⚖ 879 KB