Amorphous BN films produced in a double-plasma reactor for semiconductor applications: W. Schmolla and H.L. Hartnagel Solid St. Electron. 26 (10), 931 (1983)

• Book ID: 104157476
• Publisher: Elsevier Science
• Year: 1986
• Tongue: English
• Weight: 67 KB
• Volume: 17
• Category: Article
• ISSN: 0026-2692
• DOI: 10.1016/s0026-2692(86)80139-2