Amorphous BN films produced in a double-plasma reactor for semiconductor applications : W. Schmolla and H. L. Hartnagel. Solid-St. Electron.26 (10), 931 (1983)

• Book ID: 103277550
• Publisher: Elsevier Science
• Year: 1984
• Tongue: English
• Weight: 126 KB
• Volume: 24
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(84)90388-3