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Amorphization of silicon by ion implantation: Homogeneous or heterogeneous nucleation?

✍ Scribed by Dennis, John R.; Hale, Edward B.

Book ID: 120201510
Publisher: Informa UK (Taylor & Francis)
Year: 1976
Weight: 556 KB
Volume: 30
Category: Article
ISSN: 0033-7579
DOI: 10.1080/00337577608240825

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