Ammonia Sensing Characteristics of Sputtered Indium Tin Oxide (ITO) Thin Films on Quartz and Sapphire Substrates

✍ Scribed by Cheng-Wei Lin; Huey-Ing Chen; Tai-You Chen; Chien-Chang Huang; Chi-Shiang Hsu; Wen-Chau Liu

• Book ID: 114620717
• Publisher: IEEE
• Year: 2011
• Tongue: English
• Weight: 598 KB
• Volume: 58
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/ted.2011.2167234