We here introduce a laser-driven process to pattern transparent thin films on transparent substrates. This method utilizes a pre-patterned metal film as the dynamic release layer and the transparent thin film is selectively removed by a thermo-elastic force laser-induced in the underlying metal laye
β¦ LIBER β¦
F2-laser patterning of indium tin oxide (ITO) thin film on glass substrate
β Scribed by M.Y. Xu; J. Li; L.D. Lilge; P.R. Herman
- Publisher
- Springer
- Year
- 2006
- Tongue
- English
- Weight
- 274 KB
- Volume
- 85
- Category
- Article
- ISSN
- 1432-0630
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