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[American Vacuum Soc 2001 6th International Symposium on Plasma- and Process-Induced Damage - Monterey, CA, USA (13-15 May 2001)] 2001 6th International Symposium on Plasma- and Process-Induced Damage (IEEE Cat. No.01TH8538) - Interconnect limits on gigascale integration (GSI)

✍ Scribed by Meindl, J.D.

Book ID: 120561657
Publisher: American Vacuum Soc
Year: 2001
Weight: 103 KB
Category: Article
ISBN-13: 9780965157759
DOI: 10.1109/PPID.2001.929964

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