✦ LIBER ✦

Aluminum alloy metallization for integrated circuits

✍ Scribed by P.B. Ghate

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Aluminum metallization characterization

✍ LorenC. Skinner II 📂 Article 📅 1977 🏛 Elsevier Science 🌐 English ⚖ 43 KB

Application of Ti: W barrier metallizati

✍ P.B. Ghate; J.C. Blair; C.R. Fuller; G.E. McGuire 📂 Article 📅 1978 🏛 Elsevier Science 🌐 English ⚖ 639 KB

Chemical vapour deposition of tungsten f

✍ Y. Pauleau 📂 Article 📅 1984 🏛 Elsevier Science 🌐 English ⚖ 915 KB

Simulation of electromigration behaviour

✍ M. Scherge; V. Breternitz; Ch. Knedlik 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 229 KB

Improved r.f. sputtering technique for p

✍ R. Wechsung; G. Kienel 📂 Article 📅 1977 🏛 Elsevier Science 🌐 English ⚖ 67 KB

4732865 Self-aligned internal mobile ion

✍ DavidR Evans; James Flores; Susan Dottarar 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 89 KB