✦ LIBER ✦
Improved r.f. sputtering technique for producing Cr-Au metallization layers for microwave integrated circuits
✍ Scribed by R. Wechsung; G. Kienel
- Publisher
- Elsevier Science
- Year
- 1977
- Tongue
- English
- Weight
- 67 KB
- Volume
- 40
- Category
- Article
- ISSN
- 0040-6090
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