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Aluminium diffusion in titanium nitride films. Efficiency of TiN barrier layers

✍ Scribed by G. I. Grigorov; K. G. Grigorov; M. Stoyanova; J. L. Vignes; J. P. Langeron; P. Denjean

Publisher
Springer
Year
1993
Tongue
English
Weight
299 KB
Volume
57
Category
Article
ISSN
1432-0630

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