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AlGaN/GaN Metal–Oxide–Semiconductor High-Electron Mobility Transistor With Liquid-Phase-Deposited Barium-Doped as a Gate Dielectric

✍ Scribed by Chih-Chun Hu; Mon-Sen Lin; Tsu-Yi Wu; Adriyanto, F.; Po-Wen Sze; Chang-Luen Wu; Yeong-Her Wang


Book ID
114620764
Publisher
IEEE
Year
2012
Tongue
English
Weight
606 KB
Volume
59
Category
Article
ISSN
0018-9383

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Fabrication of AlGaN/GaN double-insulato
✍ Balachander, Krishnan ;Arulkumaran, Subramaniam ;Sano, Y. ;Egawa, Takashi ;Baska 📂 Article 📅 2005 🏛 John Wiley and Sons 🌐 English ⚖ 164 KB

## Abstract We report on the fabrication of AlGaN/GaN double‐insulator MOSHEMTs using SiO~2~ and SiN as the prime gate insulators. Both the dielectrics showed enhanced saturation current density and pinch‐off voltage compared to conventional HEMTs. The SiO~2~/SiN/AlGaN/GaN MOSHEMTs exhibited a low