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AlGaN/GaN heterostructure field-effect transistors with multi-MgxNy/GaN buffer and Photo-CVD SiO2 gate dielectric

✍ Scribed by K.H. Lee; P.C. Chang; S.J. Chang; Y.K. Su


Book ID
113916140
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
764 KB
Volume
72
Category
Article
ISSN
0038-1101

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RF and DC characteristics in Al2O3/Si3N4
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## Abstract Al~2~O~3~/Si~3~N~4~ insulated‐gate AlGaN/GaN heterostructure field‐effect transistors (HFETs) have been fabricated, where the regrown ohmic structure was incorporated to reduce the contact resistance. Excellent DC and RF characteristics have been obtained together with the low gate leak