✦ LIBER ✦

Al-doped zinc oxide films deposited by simultaneous rf and dc excitation of a magnetron plasma: Relationships between plasma parameters and structural and electrical film properties

✍ Scribed by Cebulla, R.; Wendt, R.; Ellmer, K.

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Transparent and conducting ZnO(:Al) film

✍ K Ellmer; R Cebulla; R Wendt 📂 Article 📅 1998 🏛 Elsevier Science 🌐 English ⚖ 183 KB

Study of structural and electrical prope

✍ Barhoumi, Amira; Yang, Liu; Sakly, Nawfel; Boughzala, Habib; Leroy, Gérard; Gest 📂 Article 📅 2013 🏛 EDP Sciences 🌐 English ⚖ 414 KB

Electrical and structural properties of

✍ Ji Bong Park; Se Hun Park; Pung Keun Song 📂 Article 📅 2010 🏛 Elsevier Science 🌐 English ⚖ 423 KB

Structure and physical properties of W-d

✍ Lin, Su-Shia; Liao, Chung-Sheng 📂 Article 📅 2013 🏛 Elsevier Science 🌐 English ⚖ 868 KB

Influence of Thickness on the Structural

✍ Chen, Jian; Sun, Yi Hua; Sun, Xiao Hua; Huang, Cai Hua 📂 Article 📅 2013 🏛 Trans Tech Publications, Ltd. 🌐 English ⚖ 678 KB

Correlations between process parameters,

✍ J. Tyczkowski; P. Kazimierski; H. Szymanowski 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 342 KB