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Structure and physical properties of W-doped HfO2 thin films deposited by simultaneous RF and DC magnetron sputtering

โœ Scribed by Lin, Su-Shia; Liao, Chung-Sheng


Book ID
121010387
Publisher
Elsevier Science
Year
2013
Tongue
English
Weight
868 KB
Volume
232
Category
Article
ISSN
0257-8972

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