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[AIP ION IMPLANTATION TECHNOLOGY: 16th International Conference on Ion Implantation Technology - IIT 2006 - Marseille (France) (11-16 June 2006)] AIP Conference Proceedings - Cluster size effects of gas cluster ion beams on surface modification

✍ Scribed by Toyoda, N.; Yamada, I.

Book ID: 115483271
Publisher: AIP
Year: 2006
Weight: 693 KB
Volume: 866
Category: Article
ISSN: 0094-243X
DOI: 10.1063/1.2401497

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