AIP Conference Proceedings [AIP ION IMPLANTATION TECHNOLOGY 2101: 18th International Conference on Ion Implantation Technology IIT 2010 - Kyoto, (Japan) (6–11 June 2010)] - Non-Destructive Characterization of Activated Ion-Implanted Doping Profiles Based on Photomodulated Optical Reflectance

✍ Scribed by Bogdanowicz, Janusz; Clarysse, Trudo; Moussa, Alain; Mody, Jay; Eyben, Pierre; Vandervorst, Wilfried; Rosseel, Erik; Matsuo, Jiro; Kase, Masataka; Aoki, Takaaki; Seki, Toshio

• Book ID: 120331060
• Publisher: AIP
• Year: 2011
• Weight: 994 KB
• Category: Article
• DOI: 10.1063/1.3548354