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[IEEE 11th International Conference on Ion Implantation Technology - Austin, TX, USA (16-21 June 1996)] Proceedings of 11th International Conference on Ion Implantation Technology - Ion beam induced deposition of tungsten on silicon

✍ Scribed by McLaren, M.G.; Carter, G.; Nobes, M.J.

Book ID: 126063031
Publisher: IEEE
Year: 1997
Weight: 418 KB
Category: Article
ISBN-13: 9780780332898
DOI: 10.1109/IIT.1996.586524

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