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AFM and TEM study of hydrogenated sputtered Si/Ge multilayers

✍ Scribed by C. Frigeri; L. Nasi; M. Serényi; A. Csik; Z. Erdélyi; D.L. Beke

Book ID
108268995
Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
951 KB
Volume
45
Category
Article
ISSN
0749-6036

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✍ S. Hofmann; W. Mader 📂 Article 📅 1990 🏛 John Wiley and Sons 🌐 English ⚖ 382 KB

## Abstract Sputter‐deposited multilayers of Si and Ta with a nominal period length of a double layer (Ta + Si) of 20 nm were studied with AES depth profiling and with transmission electron microscopy (TEM). The asymmetric shape of the measured Si layer profiles was fitted to model calculations bas