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Detailed structural study of low temperature mixed-phase Si films by X-TEM and ambient conductive AFM

✍ Scribed by T. Mates; P.C.P. Bronsveld; A. Fejfar; B. Rezek; J. Kočka; J.K. Rath; R.E.I. Schropp


Book ID
116668929
Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
301 KB
Volume
352
Category
Article
ISSN
0022-3093

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