✦ LIBER ✦
Detailed structural study of low temperature mixed-phase Si films by X-TEM and ambient conductive AFM
✍ Scribed by T. Mates; P.C.P. Bronsveld; A. Fejfar; B. Rezek; J. Kočka; J.K. Rath; R.E.I. Schropp
- Book ID
- 116668929
- Publisher
- Elsevier Science
- Year
- 2006
- Tongue
- English
- Weight
- 301 KB
- Volume
- 352
- Category
- Article
- ISSN
- 0022-3093
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