AES/GDS characterization of thin oxide films on FeCr sheet steels
โ Scribed by S. Suzuki; K. Suzuki
- Publisher
- John Wiley and Sons
- Year
- 1991
- Tongue
- English
- Weight
- 399 KB
- Volume
- 17
- Category
- Article
- ISSN
- 0142-2421
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โฆ Synopsis
Abstract
Thin oxide films on four kinds of commercial sheet were characterized with Auger electron spectroscopy (AES) and glow discharge optical emission spectroscopy (GDS). Enrichment of alloying elements was noticed in the thin oxide films formed in air. The depth profiles obtained by AES with ion sputtering showed that enrichment of chromium occurred at the interface between the oxide and the matrix. It was difficult with AES to obtain the profiles of silicon and manganese because of overlap of their peaks with the iron peaks on the spectrum. On the other hand, with GDS, silicon and manganese could be analysed quantitatively in thin films that are <0.05 ฮผm thick.
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The growth and characterization of zirconium oxide (ZrO 2 ) thin films prepared by thermal oxidation of a deposited Zr metal layer on SiO 2 /Si were investigated. Uniform ZrO 2 thin film with smooth surface morphology was obtained. The thermal ZrO 2 films showed a polycrystalline structure. The diel