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Kinetics characterization of the oxidation of Cu thin films at low temperature by using sheet resistance measurement

✍ Scribed by C. Zhong; Y.M. Jiang; Y.F. Luo; B. Deng; L. Zhang; J. Li


Publisher
Springer
Year
2007
Tongue
English
Weight
332 KB
Volume
90
Category
Article
ISSN
1432-0630

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