✦ LIBER ✦

Preparation of ZnO thin film by the sol-gel method using low temperature ozone oxidation

✍ Scribed by Ehara, Takashi ;Ueno, Takaaki ;Abe, Junya

Publisher: John Wiley and Sons
Year: 2010
Tongue: English
Weight: 262 KB
Volume: 207
Category: Article
ISSN: 0031-8965
DOI: 10.1002/pssa.200983720

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✦ Synopsis

Abstract

Zinc oxide thin films have been prepared by the sol–gel method from a 2‐methoxyethanol solution of zinc acetate dihydrate on SiO~2~ substrates using air, pure oxygen, and 1% ozone in oxygen as oxygen source. In the cases where air or oxygen was used as the oxygen source for thermal annealing, samples annealed at 600 to 800 °C exhibit a (0002) peak in X‐ray diffraction (XRD). A sample annealed at 700 °C exhibited the highest (0002) peak intensity in conventional thermal annealing. However, the case using 1% ozone in oxygen as the atmosphere presented different results. A sample treated in 1% ozone at 100 °C had peak intensity in XRD (0002) comparable with samples annealed at several hundreds of degree in air or oxygen. This result indicates that the high oxidation efficiency of ozone is useful in decreasing the processing temperature of the sol–gel method.

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