𝔖 Bobbio Scriptorium
✦   LIBER   ✦

AES study of the SiO2/SiC interface in the oxidation of CVD β-SiC

✍ Scribed by R. Berjoan; J. Rodriguez; F. Sibieude

Book ID
118365354
Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
524 KB
Volume
271
Category
Article
ISSN
0039-6028

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Ion beam analysis of the SiO2/SiC interf
Ion beam analysis of the SiO2/SiC interface
✍ G.V. Soares; F. Trombetta; P. Schütz; I.J.R. Baumvol; C. Radtke; F.C. Stedile 📂 Article 📅 2006 🏛 Elsevier Science 🌐 English ⚖ 152 KB

Thermal oxidation of 6H-SiC was investigated by ion beam analysis techniques. The mechanisms of oxygen transport and incorporation were accessed by sequential oxidations in dry O 2 enriched or not in the 18 O isotope and subsequent determinations of the 18 O profiles. After sequential 16 O 2 / 18 O

Transition layers at the SiO2/SiC interf
Transition layers at the SiO2/SiC interface
✍ Zheleva, Tsvetanka; Lelis, Aivars; Duscher, Gerd; Liu, Fude; Levin, Igor; Das, M 📂 Article 📅 2008 🏛 American Institute of Physics 🌐 English ⚖ 811 KB