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Phosphorous passivation of the SiO2/4H–SiC interface

✍ Scribed by Y.K. Sharma; A.C. Ahyi; T. Issacs-Smith; X. Shen; S.T. Pantelides; X. Zhu; L.C. Feldman; J. Rozen; J.R. Williams

Book ID: 113916094
Publisher: Elsevier Science
Year: 2012
Tongue: English
Weight: 865 KB
Volume: 68
Category: Article
ISSN: 0038-1101
DOI: 10.1016/j.sse.2011.10.030

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