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AES of semi-insulating polycrystalline silicon layers

✍ Scribed by Jozef Liday; Stanislav Tomek; Juraj Breza


Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
610 KB
Volume
99
Category
Article
ISSN
0169-4332

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The work presents the results of quantitative evaluation of Auger electron spectra utilizing the heights of Auger peaks normalized with respect to the background in N(E) vs. E distribution curves. The quantification method used was verified on a series of semi-insulating polycrystalline silicon samp