Electronic transport properties of LPCVD semi-insulating polycrystalline silicon (SIPOS)

✍ Scribed by R. Amokrane; S. Lynch; M. Murtagh; G.M. Crean

• Publisher: Elsevier Science
• Year: 1995
• Tongue: English
• Weight: 359 KB
• Volume: 28
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/0167-9317(95)00096-q