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Adhesion improvements in silicon carbide deposited by plasma enhanced chemical vapour deposition

✍ Scribed by V.A. Mernagh; T.C. Kelly; M. Ahern; A.D. Kennedy; A.P.M. Adriaansen; P.P.J. Ramaekers; L. McDonnell; R. Koekoek

Book ID
107930136
Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
609 KB
Volume
49
Category
Article
ISSN
0257-8972

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