Adhesion Aspects in MEMS/NEMS

✍ Scribed by Seong H. Kim (Editor); Michael T. Dugger (Editor); Kash L. Mittal (Editor)

Publisher: CRC Press
Year: 2010
Leaves: 424
Edition: 1
Category: Library

No coin nor oath required. For personal study only.

✦ Synopsis

Phenomena associated with the adhesion interaction of surfaces have been a critical aspect of micro- and nanosystem development and performance since the first MicroElectroMechanicalSystems(MEMS) were fabricated. These phenomena are ubiquitous in nature and are present in all systems, however MEMS devices are particularly sensitive to their effects

✦ Subjects

Physical Sciences;Chemistry;Physical Chemistry

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