Materials and failures in MEMS and NEMS

✍ Scribed by Raj, Baldev; Tiwari, Atul

Publisher: John Wiley & Sons ; Salem
Year: 2015
Tongue: English
Leaves: 487
Series: Materials degradation and failures series
Category: Library

No coin nor oath required. For personal study only.

✦ Table of Contents

Content: ""Half Title page""
""Title page""
""Copyright page""
""Preface""
""Chapter 1: Carbon as a MEMS Material""
""1.1 Introduction""
""1.2 Structure and Properties of Glassy Carbon""
""1.3 Fabrication of C-MEMS Structures""
""1.4 Integration of C-MEMS Structures with Other Materials""
""1.5 Conclusion""
""References""
""Chapter 2: Intelligent Model-Based Fault Diagnosis of MEMS""
""2.1 Introduction""
""2.2 Model-Based Fault Diagnosis""
""2.3 Self-Tuning Estimation""
""References""
""Chapter 3: MEMS Heat Exchangers""
""3.1 Introduction"" ""3.2 Fundamentals of Thermodynamics, Fluid Mechanics, and Heat Transfer""""3.3 MEMS Heat Sinks""
""3.4 MEMS Heat Pipes""
""3.5 Two-Fluid MEMS Heat Exchanger""
""3.6 Need for Microscale Internal Flow Passages""
""Nomenclature""
""Greek Alphabets""
""Subscripts""
""References""
""Chapter 4: Application of Porous Silicon in MEMS and Sensors Technology""
""4.1 Introduction""
""4.2 Porous Silicon in Biosensors""
""4.3 Porous Silicon for Pressure Sensors""
""4.4 Conclusion""
""References""
""Chapter 5: MEMS/NEMS Switches with Silicon to Silicon (Si-to-Si) Contact Interface"" ""5.1 Introduction""""5.2 Bi-Stable CMOS Front End Silicon Nanofin (SiNF) Switch for Non-volatile Memory Based On Van Der Waals Force""
""5.3 Vertically Actuated U-Shape Nanowire NEMS Switch""
""5.4 A Vacuum Encapsulated Si-to-Si MEMS Switch for Rugged Electronics""
""5.5 Summary""
""References""
""Chapter 6: On the Design, Fabrication, and Characterization of cMUT Devices""
""6.1 Introduction""
""6.2 cMUT Design and Finite Element Modeling Simulation""
""6.3 cMUT Fabrication and Characterization""
""6.4 Summary and Conclusions""
""Acknowledgments""
""References"" ""Chapter 7: Inverse Problems in the MEMS/NEMS Applications""""7.1 Introduction""
""7.2 Inverse Problems in the Micro/Nanomechanical Resonators""
""7.3 Inverse Problems in the MEMS Stiction Test""
""Acknowledgment""
""References""
""Chapter 8: Ohmic RF-MEMS Control""
""8.1 Introduction""
""8.2 Charge Drive Control (Resistive Damping)""
""8.3 Hybrid Drive Control""
""8.4 Control Under High-Pressure Gas Damping""
""8.5 Comparison between Different Control Modes""
""References""
""Chapter 9: Dynamics of MEMS Devices""
""9.1 Introduction""
""9.2 Modeling and Simulation"" ""9.3 Fabrication Methods""""9.4 Characterization""
""9.5 Device Failures""
""Acknowledgments""
""References""
""Chapter 10: Buckling Behaviors and Interfacial Toughness of a Micron-Scale Composite Structure with a Metal Wire on a Flexible Substrate""
""10.1 Introduction""
""10.2 Buckling Behaviors of Constantan Wire under Electrical Loading""
""10.3 Interfacial Toughness between Constantan Wire and Polymer Substrate""
""10.4 Buckling Behaviors of Polymer Substrate Restricted by Constantan Wire""
""10.5 Conclusions""
""Acknowledgments""
""References""

✦ Subjects

Microelectromechanical systems -- Design and construction. Nanoelectromechanical systems -- Design and construction. TECHNOLOGY & ENGINEERING / Mechanical

📜 SIMILAR VOLUMES

Materials and Failures in MEMS and NEMS

📁 Materials and Failures in MEMS and NEMS

✍ Atul Tiwari, Baldev Raj 📂 Library 📅 2015 🏛 Wiley-Scrivener 🌐 English

The fabrication of MEMS has been predominately achieved by etching the polysilicon material. However, new materials are in large demands that could overcome the hurdles in fabrication or manufacturing process. Although, an enormous amount of work being accomplished in the area, most of the infor

Nano-tribology and Materials in MEMS

📁 Nano-tribology and Materials in MEMS

✍ Biswajit Saha, Erjia Liu, Shu Beng Tor (auth.), Sujeet K. Sinha, N. Satyanarayan 📂 Library 📅 2013 🏛 Springer-Verlag Berlin Heidelberg 🌐 English

This book brings together recent developments in the areas of MEMS tribology, novel lubricants and coatings for nanotechnological applications, biomimetics in tribology and fundamentals of micro/nano-tribology. Tribology plays important roles in the functioning and durability of machines at sm

Modeling MEMS and NEMS

📁 Modeling MEMS and NEMS

✍ John A. Pelesko, David H. Bernstein 📂 Library 📅 2003 🏛 Chapman & Hall/CRC 🌐 English

This is a fine books that presents a basic foundation for MEMS modeling. However, I have few critiques about it: 1- It does not discuss magnetostriction modeling. 2- It does not discuss electro-thermal-elastic modeling (Current causes Joule heating, causing deflection). 3- It does not discuss elec

Modeling MEMS and NEMS

📁 Modeling MEMS and NEMS

✍ John A. Pelesko (Author); David H. Bernstein (Author) 📂 Library 📅 2002 🏛 CRC Press

Designing small structures necessitates an a priori understanding of various device behaviors. The way to gain such understanding is to construct, analyze, and interpret the proper mathematical model.Through such models, Modeling MEMS and NEMS illuminates microscale and nanoscale phenomena

NEMS/MEMS Technology and Devices

📁 NEMS/MEMS Technology and Devices

✍ Khine, Lynn; Tsai, Julius M. (Eds.) 📂 Library 📅 2011 🏛 Trans Tech Publications Ltd

This book contains selected, peer reviewed papers from the International Conference on Materials for Advanced Technologies (ICMAT 2011), June 26- July 1, 2011, at Suntec, Singapore. The emphasis of this special collection of 55 peer-reviewed papers was on NEMS/MEMS and microTAS. Particular attention

📁 Gems and gem materials

📂 Library 🌐 English