This book contains selected, peer reviewed papers from the International Conference on Materials for Advanced Technologies (ICMAT 2011), June 26- July 1, 2011, at Suntec, Singapore. The emphasis of this special collection of 55 peer-reviewed papers was on NEMS/MEMS and microTAS. Particular attention was paid to applications that involve MEMS design, modeling, fabrication processes, lab-on-a-chip and biophotonic medical devices. The volume also explores new devices and processes, innovations and engineering applications; especially those related to NEMS/MEMS technologies and devices. This is a very useful guide to this highly specialized topic.
Content:
• Front Matter
• Preface
• Table of Contents
1. Challenges and Solutions for Fabricating Isolation Trenches for High Aspect Ratio Sensors
2. Thick-Film Deposition of High-Viscous Liquid Photopolymer
3. Design and Modeling of Platinum Thin Film Microheater for High Temperature Microtensile Test Application
4. Optimization of On-Chip Interface Circuit for MEMS Sensor Based on Micro-Cantilever
5. Microfabrication of a Planar Helix with Straight-Edge Connections Slow-Wave Structure
6. Separation Gap Estimation in Dynamic Systems Actuated by Casimir Force
7. A Static Micromixer Inspired from Fractal-Like Natural Flow Systems
8. AIN Actuator for Tunable RFMEMS Capacitor
9. GEMS: A MEMS-Based Way for the Innervation of Materials
10. On the Way to the Bionic Man: A Novel Approach to MEMS Based on Biological Sensory Systems
11. Design Consideration of Membrane Structure for Thermal Actuated Micropump
12. Developing High Sensitivity Biomass Sensor Using LamΓ© Mode Square Resonator
13. Fabrication of a Peltier Device Based on InSb and SbTe Thin Films
14. Gapfill Study of Polyimides for MEMS Applications
15. A Simple Method for Quantification of Beta-Amyloid Using the Photo-Sensitive Thin Film Transistor
16. Wireless Imaging Module Assembly and Integration for Capsule Endoscopic Applications
17. Low Cost and High Resolution X-ray Lithography for Fabrication of Microactuator
18. FBAR Resonators with Sufficient High Q for RF Filter Implementation
19. Evaluation of Piezoelectric Properties of AIN Using MEMS Resonators
20. Discrete 3D T-Shaped Electrode Arrays for Moving Liquid by AC Electro-Osmosis
21. Silicon Probes for Cochlear Auditory Nerve Stimulation and Measurement
22. Focused Ion Beam Fabricated Polystyrene-Platinum Thermal Microactuator
23. Lead-Free BSZT/Epoxy 1-3 Composites for Ultrasonic Transducer Applications
24. Design, Fabrication and Characterization of Ultra Miniature Piezoresistive Pressure Sensors for Medical Implants
25. Tagging for Capsule Endoscopy Localization
26. The Negative π/2 Phase Shift of Total Reflect Light
27. High Topography Polyimide CMP Process
28. Hydridosilane Modification of Metals: An Exploratory Study
29. Multi Degree-of-Freedom Micromotor Utilizing an Electrothermal Actuator Array and a Spherical Rotor
30. Area-Selective Polymer Deposition on Micro-Area Framed by Trenches with Falling Liquid Film
31. A New Peltier Device with a Coaxial Thermocouple
32. A Portable Thermal Cycler Using a PN Sandwich-Structure Peltier Device
33. Direct Writing of Channels for Microfluidics in Silica by MeV Ion Beam Lithography
34. Studies on Quasi-Static Au-to-Au Ohmic Contact for MEMS Switches
35. Double-Step Plasma Etching for SiO2 Microcantilever Release
36. Design, Fabrication and Characterization of ZnO Based Thin Film Bulk Acoustic Resonators
37. Development of Multiple-Step SOI DRIE Process for Superior Notch Reduction at Buried Oxide
38. Study of Dry and Wet Oxide Etching for MOSFET-Based MEMS Devices
39. Oscillating Micromixers on a Compact Disc
40. Robust Sequential Flow Controls on the Centrifugal Platform
41. Fabrication of Micro-Cantilevers Using RF Magnetron Sputtered Silicon Carbide Films
42. Effect of Temperature on the Electrical and Gas Sensing Properties of Polyaniline and Multiwall Carbon Nanotube Doped Polyaniline Composite Thin Films
43. Fabrication of MEMS Based Microspeaker Using Bulk Micromachining Technique
44. Simulation Study of Side-by-Side Spiral Coil Design for Micromagnetometer
45. Fabrication and Performance Characterization of a Disposable Micropump Actuated by Piezoelectric-Disc
46. Proposal and Fabrication of a Temperature-Field Stage with an NN-Type Peltier Device
47. Effect of Substrate Temperature on Properties of Silicon Nitride Films Deposited by RF Magnetron Sputtering
48. On-Chip Trapping and Characterization of Cryptosporidium Using Surface Coated ITO - PDMS Bonded Chips
49. A Novel Micromechanical Resonator Using Two-Dimensional Phononic Crystal Slab
50. A New Robust Four Degree-of-Freedom Gyroscope Design
51. Three-Axis Capacitive SOI Accelerometer Using Combination of In-Plane and Vertical Comb Electrodes
52. Investigation of Rhabdomyosarcoma Cell Electrofusion
53. Investigation of Simple Process Technology for the Fabrication of Valveless Micropumps
54. Micro-Bubble Generation Using Continuous-Wave Laser
55. Photocatalytic Microreactor Using Monochromatic Visible Light
Keyword Index
Author Index