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Advanced Mechatronics and MEMS Devices

✍ Scribed by Jörg Eichholz, Torgny Brogårdh (auth.), Dan Zhang (eds.)

Publisher
Springer-Verlag New York
Year
2013
Tongue
English
Leaves
255
Series
Microsystems 23
Edition
1
Category
Library
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✦ Synopsis

Advanced Mechatronics and MEMS Devicesdescribes state-of-the-art MEMS devices and introduces the latest technology in electrical and mechanical microsystems. The evolution of design in microfabrication, as well as emerging issues in nanomaterials, micromachining, micromanufacturing and microassembly are all discussed at length in this volume. Advanced Mechatronics also provides a reader with knowledge of MEMS sensors array, MEMS multidimensional accelerometer, artificial skin with imbedded tactile components, as well as other topics in MEMS sensors and transducers. The book also presents a number of topics in advanced robotics and an abundance of applications of MEMS in robotics, like reconfigurable modular snake robots, magnetic MEMS robots for drug delivery and flying robots with adjustable wings, to name a few.

✦ Table of Contents

Front Matter....Pages i-xi
Experience from the Development of a Silicon-Based MEMS Six-DOF Force–Torque Sensor....Pages 1-23
Piezoelectrically Actuated Robotic End-Effector with Strain Amplification Mechanisms....Pages 25-52
Autocalibration of MEMS Accelerometers....Pages 53-88
Miniaturization of Micromanipulation Tools....Pages 89-98
Digital Microrobotics Using MEMS Technology....Pages 99-116
Flexure-Based Parallel-Kinematics Stages for Passive Assembly of MEMS Optical Switches....Pages 117-140
Micro-Tactile Sensors for In Vivo Measurements of Elasticity....Pages 141-163
Devices and Techniques for Contact Microgripping....Pages 165-178
A Wall-Climbing Robot with Biomimetic Adhesive Pedrail....Pages 179-191
Development of Bioinspired Artificial Sensory Cilia....Pages 193-206
Jumping Like an Insect: From Biomimetic Inspiration to a Jumping Minirobot Design....Pages 207-221
Modeling and H ∞ PID Plus Feedforward Controller Design for an Electrohydraulic Actuator System....Pages 223-239
Back Matter....Pages 241-249

✦ Subjects

Nanotechnology and Microengineering; Control, Robotics, Mechatronics; Biomedical Engineering

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