<p><i>Advanced Mechatronics and MEMS Devices</i>describes state-of-the-art MEMS devices and introduces the latest technology in electrical and mechanical microsystems. The evolution of design in microfabrication, as well as emerging issues in nanomaterials, micromachining, micromanufacturing and mic
Advanced Mechatronics and MEMS Devices II
✍ Scribed by Dan Zhang, Bin Wei (eds.)
- Publisher
- Springer International Publishing
- Year
- 2017
- Tongue
- English
- Leaves
- 719
- Series
- Microsystems and Nanosystems
- Edition
- 1
- Category
- Library
No coin nor oath required. For personal study only.
✦ Synopsis
This book introduces the state-of-the-art technologies in mechatronics, robotics, and MEMS devices in order to improve their methodologies. It provides a follow-up to «Advanced Mechatronics and MEMS Devices» (2013) with an exploration of the most up-to-date technologies and their applications, shown through examples that give readers insights and lessons learned from actual projects.
Researchers on mechatronics, robotics, and MEMS as well as graduate students in mechanical engineering will find chapters on:
Fundamental design and working principles on MEMS accelerometers
Innovative mobile technologies
Force/tactile sensors development
Control schemes for reconfigurable robotic systems
Inertial microfluidics
Piezoelectric force sensors and dynamic calibration techniques
...And more. Authors explore applications in the areas of agriculture, biomedicine, advanced manufacturing, and space. Micro-assembly for current and future industries is also considered, as well as the design and development of micro and intelligent manufacturing.
✦ Table of Contents
Front Matter....Pages i-xvii
Actuation of Elastomeric Micro Devices via Capillary Forces....Pages 1-18
MEMS Accelerometers: Testing and Practical Approach for Smart Sensing and Machinery Diagnostics....Pages 19-40
Highlights in Mechatronic Design Approaches....Pages 41-59
Microrobots for Active Object Manipulation....Pages 61-72
Integrating Smart Mobile Devices for Immersive Interaction and Control of Physical Systems: A Cyber-Physical Approach....Pages 73-93
Force/Tactile Sensors Based on Optoelectronic Technology for Manipulation and Physical Human–Robot Interaction....Pages 95-131
Mechanical Characterization of MEMS....Pages 133-151
Basic Theory and Modelling of Marmot-Like Robot for Mine Safety Detection and Rescuing....Pages 153-167
Reconfigurable Robot Manipulators: Adaptation, Control, and MEMS Applications....Pages 169-194
MEMS Sensors and Actuators....Pages 195-216
Soot Load Sensing in a Diesel Particulate Filter Based on Electrical Capacitance Tomography....Pages 217-252
Microfluidic Platforms for Bio-applications....Pages 253-282
Recent Advances in Mechatronics Devices: Screening and Rehabilitation Devices for Autism Spectrum Disorder....Pages 283-296
Electrochemically Derived Oxide Nanoform-Based Gas Sensor Devices: Challenges and Prospects with MEMS Integration....Pages 297-328
Minimally Invasive Medical Devices and Healthcare Devices Using Microfabrication Technology....Pages 329-340
Flexible Electronic Devices for Biomedical Applications....Pages 341-366
MEMS Devices in Agriculture....Pages 367-385
MEMS Pressure-Flow-Temperature Sensor for Hydraulic Systems....Pages 387-420
Vibrating Nanoneedle for Single Cell Wall Cutting....Pages 421-441
A Robotic Percussive Riveting System for Aircraft Assembly Automation....Pages 443-468
Photo-Induced Fabrication Technology for 3D Microdevices....Pages 469-493
Long-Range Nano-Scanning Devices Based on Optical Sensing Technology....Pages 495-522
Microfluidics for Mass Measurement of Miniature Object Like Single Cell and Single MicroParticle....Pages 523-545
Micromanipulation Tools....Pages 547-561
Inertial Microfluidics: Mechanisms and Applications....Pages 563-593
Force Sensing for Micro/Meso Milling....Pages 595-611
Magnetically Driven Microrobotics for Micromanipulation and Biomedical Applications....Pages 613-635
Design, Fabrication, and Robust Control of Miniaturized Optical Image Stabilizers....Pages 637-657
Biofeedback Technologies for Wireless Body Area Networks....Pages 659-686
Inverse Adaptive Controller Design for Magnetostrictive-Actuated Dynamic Systems....Pages 687-714
Back Matter....Pages 715-718
✦ Subjects
Nanotechnology and Microengineering;Control, Robotics, Mechatronics;Biomedical Engineering;Mechanical Engineering
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