Modeling MEMS and NEMS

✍ Scribed by John A. Pelesko, David H. Bernstein

Publisher: Chapman & Hall/CRC
Year: 2003
Tongue: English
Leaves: 364
Edition: 1
Category: Library

No coin nor oath required. For personal study only.

✦ Synopsis

This is a fine books that presents a basic foundation for MEMS modeling. However, I have few critiques about it:

1- It does not discuss magnetostriction modeling.
2- It does not discuss electro-thermal-elastic modeling (Current causes Joule heating, causing deflection).
3- It does not discuss electrokinetics.

Overall, it is a good start.

Huy Le (teaching MEMS modeling)

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