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Acetylene on Si(1 1 1): carbon incorporation in the growth of c-SiC thin layers

✍ Scribed by M De Crescenzi; R Bernardini; S Pollano; R Gunnella; P Castrucci; G Dufour; F Rochet

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Acetylene on Si(1&#xa0;1&#xa0;1): carbon incorporation in the growth of c-SiC thin layers