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Accurate extraction of the mechanical properties of thin films by nanoindentation for the design of reliable MEMS

✍ Scribed by Yuji Sasaki; Mauro Ciappa; Takayuki Masunaga; Wolfgang Fichtner

Book ID: 108210898
Publisher: Elsevier Science
Year: 2010
Tongue: English
Weight: 672 KB
Volume: 50
Category: Article
ISSN: 0026-2714
DOI: 10.1016/j.microrel.2010.07.119

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