✦ LIBER ✦

Design and development of a novel paddle test structure for the mechanical behavior measurement of thin films application for MEMS

✍ Scribed by Chi-Jia Tong; Ming-Tzer Lin

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Optical micro-paddle beam deflection mea

✍ Chi-Jia Tong; Ya-Chi Cheng; Ming-Tzer Lin; Kuan-Jung Chung; Jiong-Shiun Hsu; Chu 📂 Article 📅 2010 🏛 Springer-Verlag 🌐 English ⚖ 545 KB

Design and development of sub-micron sca

✍ Ming-Tzer Lin; Chi-Jia Tong; Chung-Hsun Chiang 📂 Article 📅 2007 🏛 Springer-Verlag 🌐 English ⚖ 340 KB