Optical micro-paddle beam deflection measurement for electrostatic mechanical testing of nano-scale thin film application to MEMS

✍ Scribed by Chi-Jia Tong; Ya-Chi Cheng; Ming-Tzer Lin; Kuan-Jung Chung; Jiong-Shiun Hsu; Chung-Lin Wu

• Publisher: Springer-Verlag
• Year: 2010
• Tongue: English
• Weight: 545 KB
• Volume: 16
• Category: Article
• ISSN: 0946-7076
• DOI: 10.1007/s00542-009-0999-7